发明名称 |
METHODS FOR FORMING PIEZOELECTRIC ULTRASONIC TRANSDUCERS, AND ASSOCIATED APPARATUSES |
摘要 |
<p>Methods are provided for creating a metal or other electrically-conductive member extending from an air-backed cavity of a piezoelectric ultrasonic transducer (pMUT) apparatus defining such an air-backed cavity, through a substrate layer disposed adjacent to the transducer device of the pMUT device, and into electrically-conductive engagement with a first electrode of the pMUT device, such that the electrically-conductive member provides an electrically-conductive engagement between the first electrode and a conformal electrically-conductive layer deposited in the air-backed cavity of the pMUT device. Associated apparatuses are also provided.</p> |
申请公布号 |
EP2528698(A1) |
申请公布日期 |
2012.12.05 |
申请号 |
EP20110711162 |
申请日期 |
2011.01.27 |
申请人 |
RESEARCH TRIANGLE INSTITUTE |
发明人 |
DAUSCH, DAVID EDWARD |
分类号 |
B06B1/06;H01L41/22;H01L41/317 |
主分类号 |
B06B1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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