发明名称 Apparatus for organic layer deposition and method for manufacturing of organic light emitting display apparatus using the same
摘要 PURPOSE: An organic layer depositing apparatus and a method for manufacturing an organic light emitting display device are provided to prevent the sagging of a patterning slit sheet and constantly maintain a space between a patterning slit sheet and a substrate. CONSTITUTION: A deposition source(110) emits deposition materials. A deposition source nozzle unit(120) includes a plurality of deposition sources nozzles. A patterning slit sheet(150) faces the deposition source nozzle unit. The patterning slit sheet is elongated and fixed to a frame(155). A blocking plate assembly(130) is located on one side of the deposition source nozzle unit. The blocking plate assembly includes a plurality of blocking plates(131) and a blocking plate frame(132).
申请公布号 KR20120131545(A) 申请公布日期 2012.12.05
申请号 KR20110049792 申请日期 2011.05.25
申请人 发明人
分类号 H01L51/56;C23C14/04 主分类号 H01L51/56
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