发明名称 Flash memory device having vertical channel structure
摘要 A flash memory device having a vertical channel structure. The flash memory device includes a substrate having a surface that extends in a first direction, a channel region having a pillar shape and extending from the substrate in a second direction that is perpendicular to the first direction, a gate dielectric layer formed around the channel region, a memory cell string comprising a plurality of transistors sequentially formed around the channel region in the second direction, wherein the gate dielectric layer is disposed between the plurality of transistors and the channel region, and a bit line connected to one of the plurality of transistors, and surrounding a side wall and an upper surface of one end of the channel region so as to directly contact the channel region.
申请公布号 US8324675(B2) 申请公布日期 2012.12.04
申请号 US20090644976 申请日期 2009.12.22
申请人 MOON HUI-CHANG;KIM HAN-SOO;CHO WON-SEOK;JANG JAE-HOON;KIM KI-HYUN;SAMSUNG ELECTRONICS CO., LTD. 发明人 MOON HUI-CHANG;KIM HAN-SOO;CHO WON-SEOK;JANG JAE-HOON;KIM KI-HYUN
分类号 H01L29/76 主分类号 H01L29/76
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