发明名称 Detector for electron column and method for detecting electrons for electron column
摘要 In a conventional micro-channel plate (MCP), a secondary electron (SE) detector or a semi-conductor detector the number of the electrons is amplified through its own structure. For such amplification a small voltage difference is applied externally or generated due to its own structure and material. The electric current of electrons undergoing the above-described procedure is amplified by an external amplification circuit. In the present invention electrons—resulting from the collision of the electron beam generated by a microcolumn—are detected by surrounding conductive wiring. The detected electrons are amplified using an amplification circuit on the outside similar to a conventional detection method.
申请公布号 US8324573(B2) 申请公布日期 2012.12.04
申请号 US20060064071 申请日期 2006.08.18
申请人 KIM HO SEOB 发明人 KIM HO SEOB
分类号 G01N23/00;G21K7/00 主分类号 G01N23/00
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