发明名称 Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation
摘要 Processes and apparatus are described that form a solar cell absorber on a surface of a workpiece by reacting a precursor layer disposed on the surface of the workpiece with an absorber constituent vapor in a heating chamber. The absorber constituent material is delivered from an absorber constituent material delivery system in molten form into a container in the heating chamber and vaporized to be used during the reaction.
申请公布号 US8323408(B2) 申请公布日期 2012.12.04
申请号 US20080137510 申请日期 2008.06.11
申请人 ZOLLA HOWARD G.;YOUNG DOUGLAS W.;BASOL BULENT M.;SOLOPOWER, INC. 发明人 ZOLLA HOWARD G.;YOUNG DOUGLAS W.;BASOL BULENT M.
分类号 C23C16/00 主分类号 C23C16/00
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