发明名称 |
Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation |
摘要 |
Processes and apparatus are described that form a solar cell absorber on a surface of a workpiece by reacting a precursor layer disposed on the surface of the workpiece with an absorber constituent vapor in a heating chamber. The absorber constituent material is delivered from an absorber constituent material delivery system in molten form into a container in the heating chamber and vaporized to be used during the reaction. |
申请公布号 |
US8323408(B2) |
申请公布日期 |
2012.12.04 |
申请号 |
US20080137510 |
申请日期 |
2008.06.11 |
申请人 |
ZOLLA HOWARD G.;YOUNG DOUGLAS W.;BASOL BULENT M.;SOLOPOWER, INC. |
发明人 |
ZOLLA HOWARD G.;YOUNG DOUGLAS W.;BASOL BULENT M. |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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