发明名称 |
Substrate support, substrate processing device and method of placing a substrate |
摘要 |
A substrate support for supporting a substrate in a processing chamber comprises a frame for carrying the substrate, at least a first fastening means fixedly attached to the frame for aligning the substrate relative to the frame, and at least a second fastening means movably attached to the frame, the second fastening means being movable relative to the frame and/or the substrate. Furthermore, a processing device comprises an edge exclusion projecting over a portion of the surface of the substrate in order to prevent processing of the portion of the surface of the substrate. A part of the edge exclusion may be moved into a gap between the edge(s) of the substrate and the frame element of the substrate support to form a labyrinth seal between the frame element and the edge of the substrate. A method of placing the substrate on the substrate support is also disclosed. |
申请公布号 |
US8323412(B2) |
申请公布日期 |
2012.12.04 |
申请号 |
US20080108320 |
申请日期 |
2008.04.23 |
申请人 |
HAAS DIETER;BERGER THOMAS;LAU SIMON;APPLIED MATERIALS, INC. |
发明人 |
HAAS DIETER;BERGER THOMAS;LAU SIMON |
分类号 |
C23C16/00;B05C13/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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