发明名称 Channel layer for a thin film transistor, thin film transistor including the same, and methods of manufacturing the same
摘要 Provided is a channel layer for a thin film transistor, a thin film transistor and methods of forming the same. A channel layer for a thin film transistor may include IZO (indium zinc oxide) doped with a transition metal. A thin film transistor may include a gate electrode and the channel layer formed on a substrate, a gate insulating layer formed between the gate electrode and channel layer, and a source electrode and a drain electrode which contact ends of the channel layer.
申请公布号 US8324628(B2) 申请公布日期 2012.12.04
申请号 US20080073102 申请日期 2008.02.29
申请人 KIM SUN-IL;SONG I-HUN;PARK YOUNG-SOO;KANG DONG-HUN;KIM CHANG-JUNG;PARK JAE-CHUL;SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM SUN-IL;SONG I-HUN;PARK YOUNG-SOO;KANG DONG-HUN;KIM CHANG-JUNG;PARK JAE-CHUL
分类号 H01L29/04;H01L21/20 主分类号 H01L29/04
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