| 摘要 |
PURPOSE: An ingot manufacturing apparatus is provided to improve thermal stability by including a filter part which selectively passes a specific component through the inside of a crucible. CONSTITUTION: A crucible(100) receives a raw material(130). A filter part(120) selectively passes a specific component through the inside of the crucible. The raw material comprises silicon and carbon. The raw material uses polycarbosilane. The filter part absorbs carbon impurities. |
