| 摘要 |
PURPOSE: A device for conditioning the surface of a polishing pad is provided to reduce the deviation of pressure delivered to the polishing pad by dispersing an electric protrusion and an electric groove combined with mutual unevenness. CONSTITUTION: A support arm(11) is installed on a supporter(201). A conditioning head(20) is combined with the support arm. A conditioning driving shaft is installed on the conditioning head. A conditioning driven shaft is installed on the conditioning head. A disk holder is arranged on the lower side of the conditioning driven shaft.
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