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经营范围
发明名称
Semiconductor Processing Apparatus having Shower Head Generating Plasma
摘要
申请公布号
KR101206975(B1)
申请公布日期
2012.11.30
申请号
KR20060059675
申请日期
2006.06.29
申请人
发明人
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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