发明名称 METHOD OF FORMING POROUS CARBON STRUCTURE BY USING INTERFERENCE LITHOGRAPHY AND POROUS CARBON STRUCTURE PREPARED BY THE SAME
摘要 <p>Provided are a method for fabricating a porous carbon structure using optical interference lithography, and a porous carbon structure fabricated by same, wherein the method for fabricating a porous carbon structure using optical light interference lithography includes: forming a photoresist layer on a substrate; irradiating a three-dimensional optical interference pattern onto the photoresist formed using three-dimensional optical interference lithography to form a three-dimensional porous photoresist pattern; coating the formed three-dimensional porous photoresist pattern with an inorganic material; heating the photoresist pattern on which the inorganic material is coated to carbonize the pattern; and removing the coated inorganic material.</p>
申请公布号 KR101207020(B1) 申请公布日期 2012.11.30
申请号 KR20100006672 申请日期 2010.01.25
申请人 发明人
分类号 C01B31/02;G03F7/20 主分类号 C01B31/02
代理机构 代理人
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