发明名称 METHOD AND DEVICE FOR MANUFACTURING ORGANIC FUNCTIONAL ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and a device for efficiently manufacturing an organic functional element, capable of manufacturing a high-quality organic functional element in which variation in the performance of an organic layer is suppressed. <P>SOLUTION: The method for manufacturing an organic functional element includes a vapor deposition step of forming an organic layer on a base material 21, which relatively moves against a nozzle, by discharging an organic layer-forming material from the nozzle. A deposition quantity-adjusting member is used, which is arranged between an opening 9aa of the nozzle and the base material and has a plurality of linear members 31 juxtaposed to each other and disposed in a direction crossing the moving direction of the base material. The linear members are arranged so that the spaces between them become larger as advancing from the center to both edges of the opening in the width direction of the opening, which is vertical to the base material-moving direction. The vapor deposition step is carried out while making the organic layer-forming material discharged from the opening pass through the spaces between the linear members. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012233245(A) 申请公布日期 2012.11.29
申请号 JP20110104233 申请日期 2011.05.09
申请人 NITTO DENKO CORP 发明人 KAKIUCHI RYOHEI;MORITA SHIGENORI;HIDA KANAKO
分类号 C23C14/24;H01L51/42;H01L51/50;H05B33/10 主分类号 C23C14/24
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