| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical waveguide device capable of reducing stress occurring inside an optical waveguide substrate due to a difference in thermal expansion coefficient. <P>SOLUTION: An optical waveguide device 10 includes an optical waveguide substrate 11 having a thickness of 30 μm or less, and a liquid crystal polymer substrate 12 holding the optical waveguide substrate 11 and having a dielectric constant lower than that of the optical waveguide substrate 11, in which the optical waveguide substrate 11 and the liquid crystal polymer substrate 12 are adhered by an adhesive layer 14. The thermal expansion efficient of each of the optical waveguide substrate 11 and the liquid crystal polymer substrate 12 has anisotropy within a substrate plane. The relative orientations of the optical waveguide substrate 11 and the liquid crystal polymer substrate 12 are adjusted to align the axial direction of the anisotropy of the optical waveguide substrate 11 to the axial direction of the anisotropy of the liquid crystal polymer substrate 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
