| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for manufacturing a section observation sample, which is capable of determining whether penetration (in a thickness direction) at an etching section is completed without opening the device during processing in inexpensive means. <P>SOLUTION: The device for manufacturing a section observation sample includes a sample stand, sample fixing means for fixing the processing object onto the sample stand, shielding plate fixing means for fixing the shielding plate onto the processing object so as to cover the surface of the processing object, ion beam radiation means for radiating an ion beam to a cross section of the processing object which is not covered by the shielding plate, and sample current measuring means for monitoring a current flowing to the sample stand side or means for measuring an amount of ion beam that is not radiated to the processing object and leaked to the opposite side to the ion beam radiation surface. <P>COPYRIGHT: (C)2013,JPO&INPIT |
