PIXEL DESIGN FOR IMPROVING THE FILL FACTOR IN A MICROBOLOMETER

摘要

According to one embodiment of the present invention, a bolometer array, having an arrangement of bolometer pixels and a pixel design for improving fill factor in a microbolometer, comprises: a lower layer including a reflective metal layer formed on a substrate; a cavity formed in the lower layer; an upper layer including a bolometer layer formed on the cavity and a permeable metal layer formed on the bolometer layer; an insulation layer for insulating the lower layer and the upper layer; and an anchor for supporting the upper layer, wherein four pixels of the bolometer share said single anchor.