| 摘要 |
The invention relates to a method for vacuum coating metal parts with lubricating and wearproof dry thin layers from a WS+ C compound, using sputtering methods of the magnetron or ionized magnetron type or cathode arc evaporation, with a view to reducing the static and dynamic friction coefficients of the working surfaces thereof. According to the invention, the method consists in coating the surfaces of metal parts by using the simultaneous sputtering of WSand of carbon/graphite, from two independent sputtering targets placed on two magnetron-type sputtering devices, where the total thickness of the coating layers is higher than 0.5 μm. The coating layer claimed by the invention consists of WSand carbon/graphite, having a single layer-type structure with a constant or gradual composition from 100% to 0% carbon, or a multilayer-type structure with various compositions and thicknesses of the intermediate layers, the multiple thin layers with super-lattice structures having thicknesses in the range of 2...10 nm. |
