| 发明名称 |
TESTING CARRIER AND BOARD ASSEMBLY |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a testing carrier for securing high airtightness. <P>SOLUTION: The testing carrier 10A comprises: a base board 21A for supporting a die 90; a cover board 31A stacked on the base board 21A so as to cover the die 90; and a sealing member 24 which is interposed between the base board 21A and the cover board 31A and surrounds the die 90. <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2012233870(A) |
申请公布日期 |
2012.11.29 |
| 申请号 |
JP20110236482 |
申请日期 |
2011.10.27 |
| 申请人 |
ADVANTEST CORP |
发明人 |
KOGURE YOSHINARI;FUJISAKI TAKASHI;NAKAMURA KIYOTO |
| 分类号 |
G01R31/26;H01L21/66;H01L21/67 |
主分类号 |
G01R31/26 |
| 代理机构 |
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代理人 |
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