| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polycrystalline silicon manufacturing technique in which mounting of a silicon core wire into a core wire holder is easy, the time required to make the core wire holder hold the silicon core wire with satisfactory strength is shortened, falling is prevented, and it is made possible to shorten growth rate control time in the early stage of deposition reaction of polycrystalline silicon. <P>SOLUTION: A core wire holder 20 has an opening 22 in an upper surface of the body, and a core wire insertion hole 21 is formed facing a lower surface side, and a silicon core wire 5 is inserted into the core wire insertion hole 21. In addition, a slit-shaped gap part 60 is formed along a virtual plane P that includes the center axis C of the core wire insertion hole 21, and the slit-shaped gap part 60 is a gap part that extends from the core wire insertion hole 21 to the outside surface of the body of the holder 20. The silicon core wire 5 that is inserted in the core wire insertion hole 21 is fastened and secured so as to narrow the distance of the gap part 60, by fastening an upper part of the body of the holder 20 from a side surface, e.g., using a securing member 31 of a bolt and nut type. <P>COPYRIGHT: (C)2013,JPO&INPIT |
