| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pin aggregate 1 that is useful for a probe card and the like to be used for electric inspection of semiconductor integrated circuits. <P>SOLUTION: A pin aggregate 1 comprises: a plurality of pipe members 3 of equal length fixed to each other; a plurality of pins 2 aligned with base end sides thereof being inserted in the inside of the pipe members 3 and fixed; and a base plate 4 having a housing part 5. The plurality of pipe members 3 are fixed as in close contact with each other in parallel in width and depth directions, and the plurality of fixed pipe members 3 are housed in the housing part 5 in the base plate 4. The tip sides of the plurality of pins 2 are projected for equal length from the ends at the same side of the plurality of pipe members 3. The plurality of pipe members 3 have an identical inner diameter, and the pin 2 has an outer diameter that is substantially the same as the inner diameter of the pipe member 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
