发明名称 |
COMPOUND INTERFEROMETER WITH MONOLITHIC MEASUREMENT CAVITY |
摘要 |
A compound common-path interferometer including first and second measurement arms for measuring a test object is arranged so that a reference optic of the first measurement arm is disconnected from a remainder of the first measurement arm and a coupling between the reference optics of the first and second measurement arms forms a monolithic measurement cavity for maintaining reference surfaces of the reference optics at a fixed spacing and orientation. Separate supports are provided for the monolithic measurement cavity and the remainder of the first measurement arm.
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申请公布号 |
US2012300213(A1) |
申请公布日期 |
2012.11.29 |
申请号 |
US201113117291 |
申请日期 |
2011.05.27 |
申请人 |
FRANKOVICH JOHN WESTON;LEE CHRISTOPHER ALAN;LITZENBERGER MICHAEL JOSEPH |
发明人 |
FRANKOVICH JOHN WESTON;LEE CHRISTOPHER ALAN;LITZENBERGER MICHAEL JOSEPH |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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地址 |
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