| 摘要 |
A positive photosensitive siloxane composition obtained by hydrolyzing and condensing a silane compound represented by general formula (1) R1 nSi(OR2)4-n and containing a diazonaphthoquinone derivative, a solvent, and at least one of each of the following three types of polysiloxanes: a polysiloxane (A) such that if pre-baked the film thereof will be soluble in a 5 weight % TMAH aqueous solution and the solution rate of said film will be 1,000Å/sec or less; a polysiloxane (B) such that if pre-baked the solution rate of the film thereof will be 4,000Å/sec or more relative to a 2.38 weight % TMAH aqueous solution; and a polysiloxane (C) such that if pre-baked the solution rate of the film thereof will be between 200 and 3,000Å/sec relative to a 2.38 weight % TMAH aqueous solution. (In the formula, R1 represents a C1-20 linear or branched cyclic alkyl group, in which any methylene may be substituted by oxygen, or a C6-20 aryl group, in which any hydrogen may be substituted by fluorine; n represents a 0 or a 1; and R2 represents a C1-5 alkyl group.) |
