| 摘要 |
A humidity sensor of the present invention is provided with: a detection element (31), in which a capacitance value changes with a first tilt, corresponding to a humidity change; and a reference element (32), in which a capacitance value changes with a second tilt smaller than the first tilt, corresponding to a humidity change. The detection element (31) has detection electrodes (33a, 33b), which are disposed to face each other at a first interval (dm), and a detecting humidity sensitive film (35a) which covers the detection electrodes (33a, 33b). The reference element (32) has reference electrodes (34a, 34b), which are disposed to face each other at a second interval (dr), and a reference humidity sensitive film (35b), which covers the reference electrodes (34a, 34b). The detecting humidity sensitive film (35a) and the reference humidity sensitive film (35b) are formed of a same material to have a same thickness. The detection electrodes (33a, 33b) and the reference electrodes (34a, 34b) are formed of a same material to have a same width and a same thickness. The second tilt becomes maximum when the second interval (dr) is at a predetermined value. The second interval (dr) is smaller than the first interval (dm) and the predetermined value. |
