| 摘要 |
<p>This method for forming an insulating film comprises an application step for applying a catalyst-containing insulating material solution to the surface of a substrate, a heating step that, after the application step, implements heat treatment of the substrate, and an ultraviolet ray irradiation step that, after the heating step, implements further heat treatment of the substrate and also irradiates the surface of the substrate with ultraviolet rays and forms an insulating film on the substrate.</p> |
