REALTIME SILICON DETECTION SYSTEM AND METHOD FOR THE PROTECTION OF MACHINERY FROM SILOXANES

摘要

An inline siloxane detection system including each of an inductively coupled plasma (ICP) exciter; a beam splitter to split a light beam emitted from the ICP exciter into secondary light beams; a first signal filter selectively configured for a wavelength corresponding to silicon and configured to receive a first secondary light beam from the beam splitter; a first detector configured to detect a silicon-indicating wavelength in the first secondary light beam; a second signal filter configured to receive second secondary light beam from the beam splitter, and further selectively configured for a background wavelength of the second secondary light beam; a second detector configured to receive and detect a filtered signal from the second signal filter; and a processor configured to receive signals from each of the first detector and the second detector and to calculate a concentration of silicon in the gas sample.