MEMS SENSOR

摘要

[Problem] An objective of this invention is to provide a MEMS sensor that is compact and capable of achieving greater sensitivity than before. [Solution] A movable electrode has a plurality of movable supports (50) disposed at intervals in the X1-X2 direction, and a plurality of movable electrode members (60) that extend out from the side of each movable support (50) and are disposed at intervals in the Y1-Y2 direction on each movable support (50). A fixed electrode has a plurality of movable supports (50) disposed at intervals in the X1-X2 direction, and a plurality of fixed electrode members (62) that extend out from the side of each fixed support (51) and are disposed at intervals in the Y1-Y2 direction on each fixed support (51). The movable supports and fixed supports are alternately arranged in the X1-X2 direction, neighboring movable supports and fixed supports are made into groups (66), and the movable electrode members (60) and fixed electrode members (62) are alternately arranged between the movable support and fixed support of each group.