| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hard film having superior abrasion resistance compared to a TiAlN film or an oxide film being a conventional hard film. <P>SOLUTION: The hard film to be formed on the surface of a substrate is comprised of (Ti<SB POS="POST">a</SB>Al<SB POS="POST">b</SB>Si<SB POS="POST">c</SB>)O<SB POS="POST">x</SB>in which the relations of: 0.3≤a≤0.7, 0.3≤b≤0.7, 0≤c≤0.2, a+b+c=1 and 0.8≤[x/(2a+1.5b+2c)]≤1.2 are satisfied, or is comprised of (Ti<SB POS="POST">a</SB>Cr<SB POS="POST">d</SB>Al<SB POS="POST">b</SB>Si<SB POS="POST">c</SB>)O<SB POS="POST">x</SB>in which the relations of: 0.05≤a≤0.4, 0.1≤d≤0.85, 0≤b≤0.7, 0≤c≤0.2, a+b+c+d=1 and 0.8≤[x/(2a+1.5d+1.5b+2c)]≤1.2 are satisfied, wherein a, d, b and c represent atomic ratios of Ti, Cr, Al and Si, and x represents an atomic ratio of O. <P>COPYRIGHT: (C)2013,JPO&INPIT |
