SEATING INSPECTION DEVICE

摘要

Measuring apparatuses (1) for determining the position of an object (3) relative to a reference surface, in particular a seating inspection device for workpieces or workpiece carriers, often have the problem that the measuring apparatuses are exposed to fluctuations in the supply pressure. Furthermore, an orifice device is often used to measure flow rate, which impedes flushing operations for cleaning. According to the invention, the use of a flow rate measuring device (20) is proposed in order to determine the position of an object (3) relative to a reference surface, in particular for seating inspection for workpieces or workpiece carriers, comprising a mass or volumetric flow rate measuring device (21) and a supply channel section (10a), which can be connected on the inlet side, preferably by means of a supply channel (10), to a medium source (4), by means of which a liquid or air is provided at a feeding pressure p, and which can be connected on the outlet side to at least one measuring nozzle (2), wherein the outlet opening of the measuring nozzle (2) or the outlet openings of the measuring nozzles (2) are located in the reference surface, wherein the supply channel section (10a) has a substantially constant cross-section so that an approximately even pressure is present in the supply channel section, and a pressure sensor (30) is provided in order to determine the pressure in the supply channel section (10a), wherein the flow rate measuring apparatus (21) and the pressure sensor (30) are connected to an evaluating unit (5), which is used to calculate and monitor the distance between the nozzle (2) and the object (3). The invention further relates to a measuring apparatus for determining the position of an object (3) relative to a reference surface, in particular a seating inspection device for workpieces or workpiece carriers, comprising at least one measuring nozzle (2), which comprises such a flow rate measuring device (20), and to methods for operating such a measuring apparatus.