| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pH sensor that can be exposed to corrosive environments. <P>SOLUTION: A pH sensor 4 comprises a substrate 40 and an ion sensitive field effect transistor (ISFET) die 10 comprising an ion sensing part that responds to pH. The ISFET die 10 is located over the substrate 40. The pH sensor 4 also comprises a protective layer 14 formed over at least a portion of an outer surface of the ISFET die 10 and at least a portion of the substrate 40. Further, the pH sensor 4 comprises a cover member mechanically coupled to the protective layer 14. The cover member houses the ISFET die 10 and the substrate 40, and the cover member defines an opening proximate to the ion sensing part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
