| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent heat generated from a rotary drive motor from causing surface temperature rise of a substrate chuck stage by a simple means, in a rotary coating apparatus which forms a coating film on a substrate by rotating the substrate and spreading the coating liquid on the surface of the substrate, thus providing a rotary coating apparatus which can form a coating film having a uniformly controlled thickness on a substrate. <P>SOLUTION: In a structure where a substrate chuck stage on which a substrate is mounted is coupled with a rotation drive shaft via a joint flange, and is connected with a drive motor for supplying torque to the rotation drive shaft, the rotation drive shaft extending from the drive motor to the substrate chuck stage or a heat flow path of the joint flange is shielded by a low thermal conductivity material provided in the heat flow path. <P>COPYRIGHT: (C)2013,JPO&INPIT |
