发明名称 OBSERVATION METHOD AND OBSERVATION DEVICE
摘要 With respect to a charged particle beam device, the step size of focal point measure for executing autofocusing is optimized to a value that is optimal with respect to the spread of an approximation curve for a focal point measure distribution. The step size of focal point measure for executing autofocusing is corrected using an image feature obtained based on a layout image derived from an image obtained at a first magnification or from design data. Autofocusing is executed based on the obtained step size to carry out observation, measurement, or to image the sample under inspection.
申请公布号 US2012300056(A1) 申请公布日期 2012.11.29
申请号 US201013575822 申请日期 2010.11.08
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 BAN NAOMA;OBARA KENJI
分类号 H04N5/232;H04N7/18 主分类号 H04N5/232
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