| 摘要 |
The invention relates to a measuring probe for measuring the thickness of thin layers, comprising a housing (14), at least one sensor element (17) which is accommodated so as to be at least slightly movable along a longitudinal axis (16) within the housing (14) and which comprises at least one coil device (44) associated with the longitudinal axis (16), and a spherical positioning cap (21) which points in the direction of the outer face of the housing (14), is arranged along the longitudinal axis (16), and has a base (55) that includes a cylindrical core section (56) and a pole cap (58) arranged on a face of the core section (56). The coil device (44), which is formed of a disk-shaped or ring-shaped support (49) with at least one Archimedean coil arranged thereon, is associated with the spherical positioning cap (21). The base (55) is made of a ferritic material while the pole cap is made of hard metal. |
