| 摘要 |
An exposure data generation method includes generating a first multi-layer wiring pattern including a plurality of wiring layers according to a netlist and a wiring rule; dividing a layer pattern of each layer included in the generated first multi-layer wiring pattern by a subfield; by referring to a pattern database in which a subfield pattern of a wiring layer, included in a second multi-layer wiring pattern generated in the subfield according to the wiring rule, and a pattern identifier corresponding to the subfield pattern are registered, extracting the pattern identifier of the subfield pattern corresponding to the divided layer pattern of the first multi-layer wiring pattern; and generating exposure data including the extracted pattern identifier and an exposure position of the subfield pattern corresponding to the extracted pattern identifier. |
