发明名称 SUBSTRATE-SPLITTING DEVICE WITH DETECTION OF OBSTACLES
摘要 A device for splitting substrates that include a cleavage plane therein. The device includes a base and a control device for performing controlled displacement of certain substrates. The control device includes at least one pusher that is mobile relative to the base. The pusher is adapted to accommodate substrates in a reception space thereon, and is capable of displacing substrates arranged above it in a substrates support. A detector is provided to determine the absence or the presence of obstacles inside at least one region of the reception space of the pusher when the pusher is in a detection position.
申请公布号 US2012298710(A1) 申请公布日期 2012.11.29
申请号 US201213475551 申请日期 2012.05.18
申请人 BESNARD TEDDY;SOITEC 发明人 BESNARD TEDDY
分类号 B25J11/00;B26F3/00 主分类号 B25J11/00
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