发明名称 METHOD FOR PRODUCING MOSAIC DIAMOND
摘要 The present invention discloses a method for producing a mosaic diamond comprising implanting ions in the vicinity of the surfaces of a plurality of single-crystal diamond substrates arranged in the form of a mosaic, or in the vicinity of the surfaces of mosaic single-crystal diamond substrates whose back surfaces are bonded by a single-crystal diamond layer, so as to form non-diamond layers; growing a single-crystal diamond layer by a vapor-phase synthesis method; and separating the single-crystal diamond layer above the non-diamond layers by etching the non-diamond layers. The method of the present invention prevents the destruction of single-crystal diamond substrates by using a process that is simpler than conventional methods, thus allowing a large quantity of mosaic diamond to be produced in a stable and efficient manner.
申请公布号 US2012302045(A1) 申请公布日期 2012.11.29
申请号 US201013515991 申请日期 2010.12.15
申请人 YAMADA HIDEAKI;CHAYAHARA AKIYOSHI;MOKUNO YOSHIAKI;SHIKATA SHINICHI 发明人 YAMADA HIDEAKI;CHAYAHARA AKIYOSHI;MOKUNO YOSHIAKI;SHIKATA SHINICHI
分类号 H01L21/20 主分类号 H01L21/20
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