| 发明名称 |
APPARATUS FOR DETECTING POSITION OF SHEET-LIKE MOLD, TRANSFER APPARATUS AND TRANSFER METHOD |
| 摘要 |
A sheet-shaped mold position detection device 183 for conveying and positioning a sheet-shaped mold M on which a fine transfer pattern M1 is formed. The sheet-shaped mold position detection device 183 includes a sheet-shaped mold position detector 191 that detects a predetermined region of the sheet-shaped mold M by detecting transmittance of light in the sheet-shaped mold M. |
| 申请公布号 |
KR20120130246(A) |
申请公布日期 |
2012.11.29 |
| 申请号 |
KR20127026142 |
申请日期 |
2011.02.24 |
| 申请人 |
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发明人 |
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| 分类号 |
B29C59/02;B29C33/30;B29C33/40;H01L21/027 |
主分类号 |
B29C59/02 |
| 代理机构 |
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代理人 |
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