| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength variable filter having excellent optical characteristics without increasing a drive voltage. <P>SOLUTION: A wavelength variable filter includes a second substrate 3 having two faces at different positions in a thickness direction thereof on a movable part 21 side, in which a drive electrode 33 is disposed on one of the two faces and a detection electrode 40 is disposed on the other face. The filter is configured in such a manner that by generating a potential difference between the drive electrode 33 and the movable part 21, electrostatic attraction is induced therebetween based on an electrostatic capacitance between the detection electrode 40 and the movable part 21, which displaces the movable part 21 as well as causes repetition of reflection of light between a fixed reflection film 35 and a movable reflection film 25 to induce interference, and thereby, light at a wavelength in accordance with the distance between the fixed reflection film 35 and the movable reflection film 25 can radiate to the outside. <P>COPYRIGHT: (C)2013,JPO&INPIT |
