发明名称 |
Broken wafer recovery system |
摘要 |
An apparatus and method for recovery and cleaning of broken substrates, especially beneficial for fabrication systems using silicon wafer carried on trays. Removal of broken wafers and particles from within the fabrication system is enabled without requiring disassembly of the system and without requiring manual labor. |
申请公布号 |
EP2528088(A2) |
申请公布日期 |
2012.11.28 |
申请号 |
EP20120168068 |
申请日期 |
2012.05.15 |
申请人 |
ORBOTECH LT SOLAR, LLC |
发明人 |
STEVENS, CRAIG LYLE;BERKSTRESSER, DAVID ERIC;BLONIGAN, WENDELL THOMAS |
分类号 |
H01L21/683;H01L21/67 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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