A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from a material having a bulk reflectance of substantially greater than or equal to 70% at the first wavelength of radiation. The material has a melting point above 1000 °C.
申请公布号
SG184557(A1)
申请公布日期
2012.11.29
申请号
SG20120075628
申请日期
2011.02.22
申请人
ASML NETHERLANDS B.V.
发明人
SOER, WOUTER;BANINE, VADIM;LOOPSTRA, ERIK;YAKUNIN, ANDREI;JAK, MARTIN