FORMATION METHOD OF DOPED REGION OF SOLAR CELL, SOLAR CELL, AND MANUFACTURING METHOD OF SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To disclose a process where a doped region of a solar cell is formed.

SOLUTION: A first doped region doped by a first dopant is formed on a first surface of a silicon substrate, and a silicon oxide film is formed on the first surface. The silicon oxide film has a first silicon oxide film which corresponds to the first doped region and a second silicon oxide film which does not correspond to the first doped region. The first silicon oxide film is thicker than the second silicon oxide film. A second dopant is injected into the silicon oxide film, and a second doped region is formed at a part of the first surface of the silicon substrate which corresponds to the second silicon oxide film.

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