| 摘要 |
PURPOSE: A high speed specimen inspecting device using several lights and a multi-line sensor camera is provided to detect various kinds of defects by scanning a line of a specimen at an identical position by the lights, thereby improving precision and reducing a failure rate. CONSTITUTION: A high speed specimen inspecting device using several lights comprises a moving member, a plurality of lights(200), a camera(300), a lens(400), a splitter, and a controlling unit(600). The moving member moves a specimen for an inspection. The lights successively emits light to an identical portion of the moved specimen at various angles. The camera photographs the specimen for which light is respectively irradiated from each position of the lights. The lens collects light reflected by or transmitted through the specimen, thereby transmitting the light through the camera. The splitter transmits the light reflected by or transmitted through the specimen toward the lens. The controlling unit edits images of the camera by receiving the same, thereby providing complete images of the specimen.
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