| 摘要 |
PURPOSE: A contact type imprinting system, a contact type imprinting method, and a stamp manufacturing method for the contact type imprinting system are provided to improve the accuracy of pattern formation. CONSTITUTION: A contact type imprinting system includes an exposure module(120), a substrate part(140), and a moving part(150). The exposure module includes a light source part(122), a stamp(131), a lens part, and a protective layer. The light source part generates UV rays. The stamp is arranged on the pathway of the light source part and selectively transmits the UV rays by including patterns. One side of the lens part is combined with the cross section of the stamp and has negative refractive index. The protective layer is combined with another side of the lens part. |
