| 摘要 |
An illumination optical apparatus (13) guides exposure light EL emitted from an exposure light source (12), to an illumination target object R. The illumination optical apparatus (13) has a plurality of spatial light modulation members (22) arranged in an array form, and each spatial light modulation member (22) is so configured that a plurality of reflecting optical elements (22a, 22b, 22c) each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members (22) is arranged in an optical path of the light emitted from the light source. |
