An monitoring apparatus of manufacture equipment

摘要

PURPOSE: An apparatus for monitoring temperature of manufacturing equipment is provided to prevent defective products generated in a process of manufacturing semiconductor by monitoring temperature of water or gas which is supplied to the equipment. CONSTITUTION: A temperature sensor(220a,220b,220c) is installed in a temperature control supply medium line. The temperature sensor senses the temperature of a temperature control medium. An abnormal temperature detecting apparatus outputs a warning signal to manufacturing equipment. The abnormal temperature detecting apparatus is connected through a temperature sensor and a temperature sensor line(Ls1,Ls2,Ls3). A temperature measuring part(241) converts the temperature of the temperature control medium to digital temperature data. [Reference numerals] (220a) Temperature sensor; (220b) Temperature sensor; (220c) Temperature sensor; (241) Temperature measuring part; (242) Communication unit; (243) Control unit; (244) Display unit; (245) Device output unit