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发明名称
摘要
申请公布号	JP5083184(B2)	申请公布日期	2012.11.28
申请号	JP20080300559	申请日期	2008.11.26
申请人		发明人
分类号	H01J65/00;B01J19/12;H01J61/35;H01L21/304	主分类号	H01J65/00
代理机构		代理人
主权项
地址

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