发明名称 Alpha-particle emitter removal
摘要 Methods of purifying acidic metal solutions by removing at least a portion of alpha-particle emitting materials are provided. The purified metal solutions are useful in a variety of applications requiring low levels of alpha-particle emission.
申请公布号 EP2528063(A2) 申请公布日期 2012.11.28
申请号 EP20120168789 申请日期 2012.05.22
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC;DOW GLOBAL TECHNOLOGIES LLC 发明人 GRANBOIS, MATTHEW L.;GOLTZ, HARLAN ROBERT;CALVERT, JEFFREY M.;RODGERS, MATTHEW LAWRENCE;MARSTON, CHARLES R.
分类号 G21F9/00;B23K35/00;C22B3/42;G21F9/04;G21F9/12;H01L23/00;H01L23/556 主分类号 G21F9/00
代理机构 代理人
主权项
地址