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发明名称
Method for doping a fin-based semiconductor device
摘要
申请公布号
EP1892750(B1)
申请公布日期
2012.11.28
申请号
EP20060119426
申请日期
2006.08.23
申请人
IMEC;STMICROELECTRONICS (CROLLES 2) SAS
发明人
LENOBLE, DAMIEN
分类号
H01L21/265;H01L21/336
主分类号
H01L21/265
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代理人
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