| 摘要 |
<p>PURPOSE: A dual-joint robot capable of moving linearly is provided to supply and eject wafer when a pallet accommodating the wafer loaded at a straight line with a fixed rotary joint. CONSTITUTION: A dual-joint robot capable of moving linearly comprises a fixed rotary joint(10), a movable rotary joint(20), and an end joint(30). The joint shaft of the fixed rotary joint is connected to a first motor and receives torque. The joint axial of the movable rotary joint is connected to a second motor and receives torque. The fixed rotary joint and the movable rotary joint are connected with each other. The rotation direction of the fixed rotary joint and the movable rotary joint are formed oppositely.</p> |
