| 摘要 |
PURPOSE: A photo detecting device and a making method thereof are provided to improve optical absorption by depositing a ZnO thin film of second conductivity type on a ZnO nanowire of first conductivity type. CONSTITUTION: A ZnO nanowire of first conductivity type is formed on a substrate(10). Diethyl zinc as zinc source is supplied on the ZnO nanowire of first conductivity type. Ammonia solution as nitrogen source is supplied. The concentration of ammonia solution is 10 to 15%. The ZnO thin film of second conductivity type is formed on the ZnO nanowire of first conductivity type. An electrode(60) is formed on the ZnO thin film of second conductivity type. [Reference numerals] (AA) N-ZnO nano wire
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