发明名称 3D STRUCTURED NON-VOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>A three dimensional (3-D) non-volatile memory device includes a pipe gate including a first pipe gate, a second pipe gate formed on the first pipe gate, and a first interlayer insulating layer interposed between the first pipe gate and the second pipe gate, word lines alternately stacked with second interlayer insulating layers on the pipe gate, a pipe channel buried within the pipe gate, and memory cell channels coupled to the pipe channel and arranged to pass through the word lines and the second interlayer insulating layers.</p>
申请公布号 KR101206157(B1) 申请公布日期 2012.11.28
申请号 KR20110038985 申请日期 2011.04.26
申请人 发明人
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
代理机构 代理人
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