发明名称 Sintering method of semiconductor oxide by using intense pulsed light
摘要 PURPOSE: A light sintering method of semiconductor oxide using white intense pulsed light irradiation process is provided to manufacture light sintered semiconductor oxide in short time at low cost. CONSTITUTION: A light sintering method of semiconductor oxide using white intense pulsed light irradiation process comprises the following steps: coating semiconductor oxide nano-particle paste or semiconductor oxide precursor and drying thereof; and irradiating the coated substrate with extreme short-wave white light at the room temperature and sintering thereof. The semiconductor oxide is selected from TiO2, SiO2, ZnO, ITO, FTO, IGZO or a mixture thereof. The extreme short-wave white light is irradiated through a xenon flash lamp. The pulse width of the xenon flash lamp is 0.1-100 ms. The pulse gap of the xenon flash lamp is 0.1-100 ms. The pulse number of the xenon flash lamp is 1-1000. The intensity of the xenon flash lamp is 0.01-100J/cm^2. [Reference numerals] (AA) Coating a substrate with TiO2 paste; (BB) Irradiating the coated substrate with TiO2 sinterable extreme short-wave white light; (CC) Forming light sintered TiO2 nano-particle as light catalyst
申请公布号 KR20120129247(A) 申请公布日期 2012.11.28
申请号 KR20110047386 申请日期 2011.05.19
申请人 发明人
分类号 C04B35/64;H01L31/0224;H01L31/0256;H01L31/04 主分类号 C04B35/64
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